北京北方華創微電子裝備有限公司
Beijing NAURA Microelectronics Equipment Co.,Ltd.
北京北方華創微電子裝備有限公司(簡稱“北方華創微電子”)的主營業務是由原七星電子的半導體裝備相關業務與原北方微電子的全部業務整合而成。
七星電子成立于2001年9月,2010年3月在深圳證券交易所上市,是國內集成電路裝備上市公司,也是國家02科技重大科技專項的主要承擔單位之一,清洗機、氧化爐、LPCVD(低氣壓化學氣相沉積)、ALD(原子層沉積)和氣體質量流量控制器(MFC)等多個項目獲得了政府科研項目資助。目前,多種高端集成電路關鍵設備批量進入大生產線,取得了良好的使用效果。同時,七星電子作為國內電力電子芯片裝備、光伏電池裝備、平板顯示裝備的主要供應商,與國內外行業主流客戶形成了長期友好的合作關系。
北方微電子成立于2001年10月,是由北京電控集團聯合七星集團、清華大學、北京大學、中科院微電子所和中科院光電技術研究所共同出資,由國內半導體高端管理技術人才和海外專家為核心團隊創建的專注于高端集成電路裝備業務的高技術公司。公司以生產銷售高端集成電路裝備為主業,重點發展刻蝕設備(Etch)、物理氣相沉積設備(PVD)和化學氣相沉積設備(CVD)三大類設備,廣泛應用于集成電路制造、先進封裝、半導體照明(LED)、微機電系統(MEMS)等領域。北方微電子自成立以來先后得到了國家科技部“十五”863集成電路制造裝備重大項目及國家02科技重大專項的研發與產業化項目的科研資助。通過十余年的努力耕耘,已經發展成為中國大陸具有較強競爭力的高端微電子工藝裝備制造企業,具有深厚的市場基礎和良好的客戶口碑。
重組后的北方華創微電子擁有高端人才50余人。產品涵蓋:等離子刻蝕(Etch)、物理氣相沉積(PVD)、化學氣相沉積(CVD)、氧化/擴散、清洗、退火等半導體工藝裝備;平板顯示制造裝備和氣體質量流量控制器等核心零部件。涉及集成電路、先進封裝、LED、MEMS、電力電子、平板顯示、光伏電池等半導體相關領域,產品行銷全國各地及東南亞、歐美,是國內覆蓋領域廣泛、產品種類眾多、建設規模較大、綜合實力強勁的半導體裝備旗艦平臺。
在集成電路領域,由公司自主研發的14nm等離子硅刻蝕機、單片退火系統、LPCVD已成功進入集成電路主流代工廠;28nm
Hardmask PVD、Al-Pad
PVD設備已率先進入國際供應鏈體系;12英寸清洗機累計流片量已突破60萬片大關;深硅刻蝕設備也于去年一舉告捷東南亞市場。這些豐碩的市場成果,標志著中國裝備企業已經實現了集成電路裝備制造技術的里程碑式跨越。
在先進封裝領域,北方華創微電子開發的刻蝕機和PVD設備已在全球主要先進封裝企業中得到了廣泛應用。公司的先進封裝PVD機臺性能優越,在全球CIS封裝企業中名列前茅;所開發的TSV刻蝕設備在大陸地區最近幾年的新增市場中亦實現了較高的市場占有率;同時應用于Bumping制程的Descum設備于2016年一經推出便收獲了市場的積極關注……北方華創將始終緊跟市場需求,不斷提供能夠精準符合客戶需求的卓越產品與優質服務。
在LED領域,ELEDE系列刻蝕機自2010年面市以來銷售量已經超過兩百余臺,其中氮化鎵刻蝕機在2014~2016連續三年新增市場占有率、出貨量大幅提升;PSS刻蝕機一直是全球主流PSS廠家的主要機臺,目前為止國內規模超卓的中圖半導體公司已累計采購該機型近百臺,對市場起到了有力的表率作用;自主開發的AlN緩沖層濺射設備,更是引領了全球LED行業技術發展趨勢,在2016年實現 AlN
Sputter的全球市場占有率提升,不僅在市場上取得了較大成功,更是在技術上一舉打破了多年來本土設備商只能處于追隨狀態的堅冰局面!而同樣面向LED芯片制造的EPEE550系列PECVD自推向市場以來,一直保持著新增市場占有率80%以上的市場業績,穩居市場前沿。
面向目前高速增長的MEMS及新興市場,北方華創微電子的深硅刻蝕設備,已批量銷往多家科研機構及生產線,服務于微納制造、光通信、化合物半導體、功率器件等多個新興領域,客戶安裝量超過百臺以上;應用于薄膜/厚膜硅外延的APCVD系統在2016年更是一舉獲得了硅外延市場認可,斬獲了客戶大批采購訂單。
在光伏制造領域,公司研發了國內應用于高效光伏電池生產的負壓擴散爐,獲得了市場認可,目前已成為市場主流產品;研發的晶硅電池線的大部分關鍵生產設備如在線濕法刻蝕機、槽式單晶制絨機、臥式擴散爐、PECVD等設備均已實現了進口替代。
在平板顯示領域,北方華創微電子公司是國內TFT-LCD生產線的骨干設備供應商,多種產品在客戶G5至G10.5各個世代TFT-LCD生產線及OLED生產線上批量應用;CELL段的ODF工藝紫外固化爐UV
Cure以及Cutting工藝的Grind
Cleaner等設備均在各世代生產線占據重要份額。
此外,北方華創微電子公司在氣體流量測量和控制方面亦擁有多項關鍵技術優勢,氣體質量流量控制器(MFC)產品行銷歐美。
在為半導體領域客戶打造的產品藍圖中,新技術、新產品、新工藝代代更迭、生生不息。正如“北方華創”品牌的英文名稱——“NAURA”所寓意的,“北方華創”的明星產品如浩瀚星辰般在半導體宇宙中璀璨閃耀。
Beijng NAURA Microelectronics Equipment
Co.,Ltd. (NAURA Microelectronics) is integrated by the related
business of semiconductor equipment of original Sevenstar and all the business
of original NMC.
Sevenstar was established in
September 2001, and went public on Shenzhen Stock Exchange in March 2010; which
is the first listed company involves integrated circuit equipment manufacturing,
and also one of the main responsible units specializing in 02 National
Major Scientific and Technological Projects; Cleaning System, Oxidation Furnace, LPCVD
(Low pressure chemical vapor deposition), ALD (atomic layer deposition), Gas Mass
Flow Controller (MFC) and more research projects are funded by the government.
At present, a variety of key equipment for high-end integrated circuits has
been launched into mass production. Sevenstar, which acts as the main supplier
for domestic chip equipment, photovoltaic equipment, and flat panel display
equipment, is entering a long-term cooperative relationship with leading
customers from all over the world.
NMC was established in October 2001,
and is jointly funded by Beijing Electronics Holding Co., Ltd, Beijing
SevenStar Science &Technology Group, Ltd., Tsinghua University, Peking
University, Institute of Microelectronics of the Chinese Academy of Sciences
and Institute of Optics and Electronics of the Chinese Academy of Sciences; it
is a high-tech company founded by domestic semiconductor high-end management
and technical personnel and overseas experts that form the core team and
focusing on high-end integrated circuit equipment. The company is committed to
the development of high-end semiconductor equipment in three major categories – Etching equipment
(Etch), Physical Vapor Deposition (PVD) equipment and Chemical Vapor Deposition
(CVD) equipment, which is widely used in integrated circuit manufacturing,
advanced packaging, light emitting diode (LED), micro-electromechanical systems
(MEMS), etc. NAURA Microelectronics has gained scientific research
funding from major projects of the "11th Five-Year Plan" of the Ministry
of Science and Technology, such as the 863 Integrated Circuit Manufacturing
Equipment and the research and development of 02 National Major Scientific and
Technological Projects since its establishment. Through over 10 years of hard
working, it has developed into a strong and competitive manufacturing
enterprise for high-end semiconductor technology and equipment in China, with a
strong market base and high customer reputation.
Since restructuring, NAURA Microelectronics has thousands of people in the central organization department and more than 50 top-end talent . Products include: Plasma Etching (Etch), Physical Vapor Deposition
(PVD), Chemical Vapor Deposition (CVD), Oxidation/Diffusion, Cleaning System, Annealing
and other semiconductor technology and equipments, as well as flat panel
display manufacturing equipment, gas mass flow controller, and other core
components; it is involved in integrated circuits, advanced packaging, LED,
MEMS, power electronics, flat panel displays, photovoltaic cells and other
semiconductor-related areas; the products are sold throughout China, Southeast
Asia, Europe and the United States; it is the flagship platform for
semiconductor equipment which has the most extensive domestic coverage, numerous products, large scale construction, and strong
comprehensive strength.
In the field of integrated circuits,
14nm plasma silicon etching equipment, single wafer annealing system, and LPCVD
that are developed independently by the company have successfully entered the
mainstream factory for integrated circuitry; 28nm Hardmask PVD and Al-Pad PVD
equipment have taken the lead in the international supply chain; the cumulative
flow of pieces of 12 inch cleaning system has exceeded 600,000; deep silicon
etching equipment was also a success in the Southeast Asian market last year.
These fruitful market results by Chinese equipment companies have hit a
symbolic milestone for integrated circuit manufacturing technology.
In the field of advanced packaging,
the etching equipment and PVD equipment developed by NAURA Microelectronics have been widely used among the
world's foremost advanced packaging enterprises. The performance of the
company's advanced packaging PVD equipment is excellent, taking the lead in the
world's CIS packaging enterprises; the developed TSV etching
equipment has also occupied a high market share in the newly appearing markets
in recent years; at the same time, Descum equipment that is used in the Bumping
process has gained active attention among market watchers since its launch in
2016—NAURA will always keep abreast of market demands, and will
continuously provide Microelectronics excellent products and services, in
steadfast agreement with customer requirements.
In the field of LED, the sales volume
of the ELEDE series of etching equipment has exceeded more than two million
since its launch in 2010, in which, the market share of gallium nitride etching
equipment in newly appearing markets has exceeded 80% from 2014 to 2016. Its
shipment is in the top position worldwide. The PSS etching machine has been the main choice for the world's leading PSS manufacturers. Zhongtu Semiconducto, which is the
largest semiconductor company in China, has consecutively purchased nearly 100
models of this kind, playing a significant role in the market. The
independently developed AlN buffer layer sputtering equipment has led the
trends of technology development for the global LED industry. In 2016, AlN Sputter's
global market share occupied the leading position, not only achieving great success
in the market, but also technically overcoming accusations that domestic
equipment manufacturers are merely followers! Also, EPEE550 series PECVD
manufactured for LED chips has maintained a market share of more than 80% in
the emerging market since its launch, ranking the leading position stably.
With rapid growth of MEMS and
emerging markets, NAURA Microelectronics' institutions and
production lines, serving micro-nano manufacturing, optical communications,
compound semiconductors, power devices, and some other emerging areas. The
number of installed equipment has exceeded 100 units; APCVD system that is used
in thin/thick film silicon epitaxy was recogniazed in the silicon epitaxy
market in 2016, winning a large number of purchase orders.
In the field of photovoltaic
manufacturing, the company has developed negative-pressure diffusion
furnace which be used in high-performance solar cell manufacturing, gaining access to market recognition,and now become the mainstream product in the market. Most key production equipment of
developed crystalline silicon cell line such as inline Wet Etching System,
Batch Texturing System, Horizontal Diffusion Furnace, and PECVD have
substituted the imported products.
In the field of flat panel display,
NAURA Microelectronics is the backbone for equipment suppliers of
the domestic TFT-LCD production line. A variety of products are applied in batch
in the customer G5 to G10.5 TFT-LCD production lines and the OLED production
line. UV Cure of CELL segment which adopts the ODF technique and Grind Cleaner
of Cutting process occupy an important share in production lines of all
generations.
Moreover, NAURA Microelectronics has several key technical advantages
in gas flow measurement and control. The gas mass flow controller (MFC) is
popular in Europe and America, always a leading brand in the domestic market.
In the blueprint for products built
for customers in the semiconductor field, new technologies, new products and
new processes are changing from generation to generation. As "NAURA"
implies our products will shining like celestial beacons in the galaxy of
semiconductor industry.